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pISSN : 1598-706X / eISSN : 2288-8381


(논문)연구논문

한국주조공학회지 (20권3호 188-196)

A Study on the Vacuum Casting of Poly-Si Wafer

다결정 Si 기판의 진공주조법에 관한 연구

Geun-Hee Lee, Zin-Hyoung Lee

KAIST

Abstract

A vacuum casting was proposed as a new fabrication method of Si wafer for solar cell substrate. It was tried to fabricate a Si plate with good properties and to reduce the production cost by direct vacuum casting. By 5~10 cmHg of pressure difference Si plate with 50x46x1.5 mm³ was fabricated. For the preventing of the reaction between graphite mold and Si melt, BN powder coating or BN insert were used. The Si wafer was poly crystalline with 100 μm~1 mm order of grain size. And there were some twins and dislocations in the grains.

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